A reference-free micro defect visualization using pulse laser scanning thermography and image processing

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As quality control of micro devices and early detection of micro defects in these devices are becoming increasingly important, the demand for a fast and automated online inspection technique to detect micro defects with high spatial resolution is increasing. In this study, a reference-free micro defect visualization algorithm is developed based on laser scanning thermography to detect micro defects in devices instantaneously and automatically with high spatial resolution. A pulse modulated continuous wave laser generates thermal waves in a target device, and the corresponding thermal responses are recorded by an infrared (IR) camera. When the thermal wave encounters a micro defect, the propagation of the thermal wave is blocked at the interface of the micro defect. The blockage of the thermal wave is detected by the proposed reference-free micro defect visualization algorithm. First, an edge detection algorithm is applied to a raw thermal image obtained at a specific time point to extract the thermal discontinuities formed at the boundaries of the defect. The edge images obtained from all time sequences are then assembled into a single accumulated edge image to accentuate defect-induced thermal disturbances in the form of edge features. Finally, the accumulated edge image is automatically processed using a binary imaging algorithm to visualize the micro defect in the target device. The performance of the proposed reference-free micro defect visualization algorithm is examined using two types of specimens, semiconductor chips and ceramic-epoxy composites. The proposed algorithm successfully diagnoses micro defects ranging from 4 mu m to 40 mu m in width
Publisher
IOP PUBLISHING LTD
Issue Date
2016-07
Language
English
Article Type
Article
Citation

MEASUREMENT SCIENCE AND TECHNOLOGY, v.27, no.8

ISSN
0957-0233
DOI
10.1088/0957-0233/27/8/085601
URI
http://hdl.handle.net/10203/212550
Appears in Collection
CE-Journal Papers(저널논문)
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