DC Field | Value | Language |
---|---|---|
dc.contributor.author | Jang, Young Jae | - |
dc.contributor.author | Lee, Min Seok | - |
dc.contributor.author | Park, Jinhyeok | - |
dc.date.accessioned | 2016-07-25T09:20:36Z | - |
dc.date.available | 2016-07-25T09:20:36Z | - |
dc.date.created | 2016-07-08 | - |
dc.date.issued | 2015-10-16 | - |
dc.identifier.citation | International Symposium on Semiconductor Manufacturing Intelligence | - |
dc.identifier.uri | http://hdl.handle.net/10203/212079 | - |
dc.language | English | - |
dc.publisher | International Symposium on Semiconductor Manufacturing Intelligence | - |
dc.title | System Design of AMHS using Wireless Power Transfer (WPT) Technology for Semiconductor Wafer FAB | - |
dc.type | Conference | - |
dc.type.rims | CONF | - |
dc.citation.publicationname | International Symposium on Semiconductor Manufacturing Intelligence | - |
dc.identifier.conferencecountry | KO | - |
dc.identifier.conferencelocation | Kaist, Daejeon | - |
dc.contributor.localauthor | Jang, Young Jae | - |
dc.contributor.localauthor | Lee, Min Seok | - |
dc.contributor.localauthor | Park, Jinhyeok | - |
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