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College of Engineering(공과대학)School of Mechanical and Aerospace Engineering(기계항공공학부)Dept. of Mechanical Engineering(기계공학과)ME-Journal Papers(저널논문)

Synthesis of pseudobrookite titanium oxynitride Ti3-delta O4N films by laser chemical vapor deposition

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dc.contributor.authorIto, Akihikoko
dc.contributor.authorJoo, Hye-Sookko
dc.contributor.authorKim, Taek-Sooko
dc.contributor.authorGoto, Takashiko
dc.date.accessioned2016-07-25T08:28:19Z-
dc.date.available2016-07-25T08:28:19Z-
dc.date.created2016-07-13-
dc.date.created2016-07-13-
dc.date.created2016-07-13-
dc.date.issued2015-06-
dc.identifier.citationVACUUM, v.116, pp.121 - 123-
dc.identifier.issn0042-207X-
dc.identifier.urihttp://hdl.handle.net/10203/211886-
dc.description.abstractPseudobrookite Ti3-delta O4N films were prepared by laser chemical vapor deposition with titanium tetrai-sopropoxide and NH3 as precursors. By increasing the deposition temperature from 964 K to 1294 K, the phase composition of the films changed from TiO2 to Ti3-delta O4N and subsequently to Ti(O,N). Ti3-delta O4N films with fine columnar grains were obtained at 1030 K and at a total chamber pressure of 0.6-0.8 kPa. The deposition rate of these films reached 7 mu m h(-1).-
dc.languageEnglish-
dc.publisherPERGAMON-ELSEVIER SCIENCE LTD-
dc.titleSynthesis of pseudobrookite titanium oxynitride Ti3-delta O4N films by laser chemical vapor deposition-
dc.typeArticle-
dc.identifier.wosid000354582900021-
dc.identifier.scopusid2-s2.0-84926504833-
dc.type.rimsART-
dc.citation.volume116-
dc.citation.beginningpage121-
dc.citation.endingpage123-
dc.citation.publicationnameVACUUM-
dc.identifier.doi10.1016/j.vacuum.2015.03.015-
dc.contributor.localauthorKim, Taek-Soo-
dc.contributor.nonIdAuthorIto, Akihiko-
dc.contributor.nonIdAuthorJoo, Hye-Sook-
dc.contributor.nonIdAuthorGoto, Takashi-
dc.description.isOpenAccessN-
dc.type.journalArticleArticle-
dc.subject.keywordAuthorTi3-delta O4N-
dc.subject.keywordAuthorTitanium oxynitride-
dc.subject.keywordAuthorPseudobrookite-
dc.subject.keywordAuthorLaser chemical vapor deposition-
dc.subject.keywordPlusSYSTEM-
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ME-Journal Papers(저널논문)
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