Rib waveguide-based athermal micro-ring resonator

Abstract

In this paper, we demonstrated athermal micro-ring resonator. We numerically analyzed the temperature sensitivity of SOI rib waveguide micro-ring resonators for different waveguide dimensions with over laying of negative thermooptic coefficient (TOC) polymer materials. The simulation results show that an athermal ring resonator can be achieved by a narrow width waveguide structure of a certain dimension with a certain polymer over layer for the input light of transverse magnetic field orientation. We fabricated a 30 mu m radius ring resonator with a SOI rib waveguide structure of 200 nm width, over laying a polymer material of refractive index 1.45 and a TOC value of -1.8 x 10(-4). We measured the temperature sensitivity of the polymer covered fabricated ring resonator, and achieved a temperature dependant resonant wavelength shift of about 0.5 pm/A degrees C.