The effect of Al content on the work function engineering at TiAlN/HfO2 interface
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Kim, Geun Myeong | ko |
| dc.contributor.author | Oh, Young Jun | ko |
| dc.contributor.author | Chang, Kee Joo | ko |
| dc.date.accessioned | 2016-07-13T03:55:37Z | - |
| dc.date.available | 2016-07-13T03:55:37Z | - |
| dc.date.created | 2015-12-29 | - |
| dc.date.issued | 2015-03 | - |
| dc.identifier.citation | 2015 APS March Meeting | - |
| dc.identifier.uri | http://hdl.handle.net/10203/211131 | - |
| dc.language | English | - |
| dc.publisher | APS | - |
| dc.title | The effect of Al content on the work function engineering at TiAlN/HfO2 interface | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.publicationname | 2015 APS March Meeting | - |
| dc.identifier.conferencecountry | US | - |
| dc.identifier.conferencelocation | Henry B. Gonzalez Convention Center, San Antonio, TX | - |
| dc.contributor.localauthor | Chang, Kee Joo | - |
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