MEMS 기술을 이용한 압전저항 실리콘 스트레인게이지의 제작Fabrication of Piezo-resistive Silicon Strain Gauge Using MEMS Technology

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Issue Date
2007
Language
KOR
Citation

한국항공우주학회 2007년도 추계학술발표회

URI
http://hdl.handle.net/10203/20888
Appears in Collection
AE-Conference Papers(학술회의논문)

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