Novel Concept Electrowetting Microlens Array Based on Passive Matrix

Abstract

We report for the first time a severally operable electrowetting microlens array using a passive matrix. This development can be used to simplify complex optical systems and to achieve a new optical system. The bottom chamber of the lens array was patterned with Cu, parylene C, and Teflon, while the top glass was patterned with indium zinc oxide. Characteristics of the individually operable electrowetting lens array are presented, as is information on the electrode structure, fabrication process, and analysis of the fabricated sample. Experimental measurements show that the diopter of the proposed system ranged from -666 to 333 D with a 300-um aperture; the response time had a value of 0.8 ms (>1000 Hz), which confirms the individual operation of each lens. Although it has a short positive diopter region, our proposed individually operable electrowetting lens array has the potential to advance conventional optical systems in fields, such as microscopy, cameras, and displays.