학위논문(석사) - 한국과학기술원 : 전기및전자공학과, 2015.2 ,[vii, 63. :]
원자층 증착 방법; 일함수; 에르븀; 탄화에르븀; 에르븀저마나이드; Metal ALD; Tris(isopropylcyclopentadienyl)erbium; Workfunction; Erbium; Erbium carbide; Erbium di-carbide; Erbium germanide
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