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College of Engineering(공과대학)School of Electrical Engineering(전기및전자공학부)EE-Journal Papers(저널논문)

Effects of Bragg reflector annealing on performance factors of FBAR-based ultramass-sensitive sensors

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dc.contributor.authorYim, Munhyukko
dc.contributor.authorLee, Eunjuko
dc.contributor.authorKim, Yeongseonko
dc.contributor.authorYoon, Giwanko
dc.date.accessioned2016-04-20T06:59:05Z-
dc.date.available2016-04-20T06:59:05Z-
dc.date.created2015-07-01-
dc.date.created2015-07-01-
dc.date.created2015-07-01-
dc.date.issued2015-09-
dc.identifier.citationMICROWAVE AND OPTICAL TECHNOLOGY LETTERS, v.57, no.9, pp.2134 - 2137-
dc.identifier.issn0895-2477-
dc.identifier.urihttp://hdl.handle.net/10203/205615-
dc.description.abstractWe present the film bulk acoustic wave resonator-based ultramass-sensitive (FBAR-UMS) sensors in which their resonance characteristic improvements, mainly due to Bragg reflector (BR) annealing, favorably influence their performance factors. We fabricated two kinds of FBAR-UMS sensors, respectively, with nonannealed and annealed BRs (namely, nonannealed and annealed sensors) and investigated the effects of BR annealing on their performance factors by comparing their resonance frequency shift (-f(r)), measured before and after each mass loading (m). As a result, the annealed sensors showed much larger mass-loading effect and detectable mass range than the nonannealed ones.-
dc.languageEnglish-
dc.publisherWILEY-BLACKWELL-
dc.titleEffects of Bragg reflector annealing on performance factors of FBAR-based ultramass-sensitive sensors-
dc.typeArticle-
dc.identifier.wosid000357014300034-
dc.identifier.scopusid2-s2.0-84933056648-
dc.type.rimsART-
dc.citation.volume57-
dc.citation.issue9-
dc.citation.beginningpage2134-
dc.citation.endingpage2137-
dc.citation.publicationnameMICROWAVE AND OPTICAL TECHNOLOGY LETTERS-
dc.identifier.doi10.1002/mop.29282-
dc.contributor.localauthorYoon, Giwan-
dc.description.isOpenAccessN-
dc.type.journalArticleArticle-
dc.subject.keywordAuthorBragg reflector annealing-
dc.subject.keywordAuthorfilm bulk acoustic wave resonator-based ultramass-sensitive-
dc.subject.keywordAuthormass loading-
dc.subject.keywordAuthorresonance characteristic-
dc.subject.keywordAuthorresonance frequency shift-
dc.subject.keywordPlusMASS SENSOR-
dc.subject.keywordPlusRESONATORS-
dc.subject.keywordPlusDEVICES-
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EE-Journal Papers(저널논문)
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