Driving frequency effects on the characteristics of atmospheric pressure capacitive helium discharge

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Atmospheric pressure helium discharge characteristics were investigated for varying driving radio frequencies in the range between 1.86 and 27.1 MHz. As the driving frequency is raised, both gas breakdown and alpha-gamma transition voltages decrease due to the reduction in the electron drift loss. In addition, different discharge features such as normal, abnormal, alpha, and gamma modes show certain dependences on the frequency. Using a simple circuit model, the changes in sheath thickness from 2.35 to 0.11 mm, electron density from 0.26 to 15.6x10(11) cm(-3) was obtained by raising the frequency from 1.86 to 27.1 MHz.
Publisher
AMER INST PHYSICS
Issue Date
2008-12
Language
English
Article Type
Article
Keywords

PLASMA SOURCE; MODE

Citation

APPLIED PHYSICS LETTERS, v.93, no.22

ISSN
0003-6951
DOI
10.1063/1.3043451
URI
http://hdl.handle.net/10203/20425
Appears in Collection
NE-Journal Papers(저널논문)
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