Surface plasmon interference lithography using Al grating structure on glass

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Publisher
SPIE Micro+ Nano Materials, Devices, and Applications 2015
Issue Date
2015-12-06
Language
English
Citation

SPIE Micro+ Nano Materials, Devices, and Applications 2015

URI
http://hdl.handle.net/10203/204142
Appears in Collection
EE-Conference Papers(학술회의논문)
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