DC Field | Value | Language |
---|---|---|
dc.contributor.author | Jung, Park Gi | ko |
dc.contributor.author | Hoon, Seo Sang | ko |
dc.contributor.author | Wook, Chung Chin | ko |
dc.contributor.author | Chang, Hong-Young | ko |
dc.date.accessioned | 2016-04-12T08:36:57Z | - |
dc.date.available | 2016-04-12T08:36:57Z | - |
dc.date.created | 2013-11-04 | - |
dc.date.created | 2013-11-04 | - |
dc.date.issued | 2013-10 | - |
dc.identifier.citation | PLASMA SOURCES SCIENCE & TECHNOLOGY, v.22, no.5 | - |
dc.identifier.issn | 0963-0252 | - |
dc.identifier.uri | http://hdl.handle.net/10203/203660 | - |
dc.description.abstract | In this work, we attempt to overcome the problem of non-uniformity of large-area capacitively coupled plasmas. We select a multi-electrode concept and construct a system with two concentric electrodes. In the two-circuit model, both electrodes have the same area. The plasma of this system is measured by a two-dimensional probe array. We measure the plasma in the large-area chamber that has the multi-electrode. We reduce the non-uniformity to almost 3% and investigate the conditions of a uniform plasma. | - |
dc.language | English | - |
dc.publisher | IOP PUBLISHING LTD | - |
dc.subject | FREQUENCY CAPACITIVE DISCHARGES | - |
dc.subject | STANDING-WAVE | - |
dc.subject | DEPOSITION | - |
dc.subject | ELECTRODE | - |
dc.title | On the plasma uniformity of multi-electrode CCPs for large-area processing | - |
dc.type | Article | - |
dc.identifier.wosid | 000325246400005 | - |
dc.identifier.scopusid | 2-s2.0-84885391230 | - |
dc.type.rims | ART | - |
dc.citation.volume | 22 | - |
dc.citation.issue | 5 | - |
dc.citation.publicationname | PLASMA SOURCES SCIENCE & TECHNOLOGY | - |
dc.identifier.doi | 10.1088/0963-0252/22/5/055005 | - |
dc.contributor.localauthor | Chang, Hong-Young | - |
dc.contributor.nonIdAuthor | Jung, Park Gi | - |
dc.contributor.nonIdAuthor | Hoon, Seo Sang | - |
dc.contributor.nonIdAuthor | Wook, Chung Chin | - |
dc.type.journalArticle | Article | - |
dc.subject.keywordPlus | FREQUENCY CAPACITIVE DISCHARGES | - |
dc.subject.keywordPlus | STANDING-WAVE | - |
dc.subject.keywordPlus | DEPOSITION | - |
dc.subject.keywordPlus | ELECTRODE | - |
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