DC Field | Value | Language |
---|---|---|
dc.contributor.author | Lee, Hyunjoo J. | ko |
dc.contributor.author | Kim, Yanghee | ko |
dc.contributor.author | Yoon, Eui-Sung | ko |
dc.contributor.author | Cho, Il-Joo | ko |
dc.date.accessioned | 2016-04-06T01:25:27Z | - |
dc.date.available | 2016-04-06T01:25:27Z | - |
dc.date.created | 2015-06-17 | - |
dc.date.created | 2015-06-17 | - |
dc.date.created | 2015-06-17 | - |
dc.date.issued | 2014-08 | - |
dc.identifier.citation | JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, v.23, no.4, pp.771 - 773 | - |
dc.identifier.issn | 1057-7157 | - |
dc.identifier.uri | http://hdl.handle.net/10203/202948 | - |
dc.description.abstract | We present close-packed microlens arrays (MLAs) with high numerical aperture (NA) over a large range of dimensions based on glass blowing process and replication method. Polydimethylsiloxane (PDMS) MLAs with diameters from 50 mu m to 1 mm and a high NA of 0.37 (maximum achievable NA for a PDMS plano-convex lens) are demonstrated, which are difficult to achieve with the conventional methods for large microlenses. In addition, MLAs with various fill-factors up to 96.1% and different base shapes are demonstrated. By adjusting the cavity depth and the chamber pressure, the ratio of sag height and diameter can be further adjusted. [2013-0359] | - |
dc.language | English | - |
dc.publisher | IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC | - |
dc.subject | FABRICATION | - |
dc.title | Versatile Size and Shape Microlens Arrays With High Numerical Apertures | - |
dc.type | Article | - |
dc.identifier.wosid | 000341573300004 | - |
dc.identifier.scopusid | 2-s2.0-84905581655 | - |
dc.type.rims | ART | - |
dc.citation.volume | 23 | - |
dc.citation.issue | 4 | - |
dc.citation.beginningpage | 771 | - |
dc.citation.endingpage | 773 | - |
dc.citation.publicationname | JOURNAL OF MICROELECTROMECHANICAL SYSTEMS | - |
dc.identifier.doi | 10.1109/JMEMS.2014.2305993 | - |
dc.contributor.localauthor | Lee, Hyunjoo J. | - |
dc.contributor.nonIdAuthor | Kim, Yanghee | - |
dc.contributor.nonIdAuthor | Yoon, Eui-Sung | - |
dc.contributor.nonIdAuthor | Cho, Il-Joo | - |
dc.type.journalArticle | Article | - |
dc.subject.keywordAuthor | Glass reflow | - |
dc.subject.keywordAuthor | high numerical aperture | - |
dc.subject.keywordAuthor | microlens arrays | - |
dc.subject.keywordAuthor | replication method | - |
dc.subject.keywordPlus | FABRICATION | - |
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