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Results 31-34 of 34 (Search time: 0.003 seconds).
| NO | Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date) |
|---|---|
| Gate Oxide Damage by Plasma Oxide Deposition and Via RIE Hyung-Cheol Shin, American Vacuum Society Plasma Etch 1992 Symposium, 1992 | |
| Impact of Plasma Charging Damage and Diode Protection on Scaled Thin Oxide Hyung-Cheol Shin, IEDM Technical Digest, pp.467 - 470, 1993 | |
| Plasma-Etching induced Damage to Thin Oxide Hyung-Cheol Shin, IEEE/SEMI Advanced Semiconductor Manufacturing Conference, pp.79 - 83, 1992 | |
| A Model of Thin Oxide Damage by Plasma Etching and Ashing Processes Hyung-Cheol Shin, Plasma Etch, pp.27 - 29, 1991 |