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NO Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date)
1
THE EFFECTS OF CHLORINE CONTENT ON THE PROPERTIES OF TITANIUM CARBONITRIDE THIN-FILM DEPOSITED BY PLASMA ASSISTED CHEMICAL VAPOR-DEPOSITION

KIM, SB; Choi, Si-Kyungresearcher; Chun , Soung Soonresearcher; KIM, KH, JOURNAL OF VACUUM SCIENCE TECHNOLOGY A-VACUUM SURFACES AND FILMS, v.9, no.4, pp.2174 - 2179, 1991-07

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