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NO Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date)
1
EFFECTS OF DEPOSITION RATE ON THE ENCROACHMENT IN TUNGSTEN FILMS REDUCED BY H-2

PARK, YW; KIM, IL; Park, Chong-Ookresearcher; Chun , Soung Soonresearcher, JOURNAL OF MATERIALS SCIENCE, v.26, no.19, pp.5318 - 5322, 1991-10

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