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NO Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date)
1
Dependence of oxygen redistribution on titanium film thickness during titanium silicide formation by rapid thermal annealing

Kang, S.W.; Park, Sin Chong; Chun , Soung Soon, JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, v.7, no.6, pp.3246 - 3250, 1989-11

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