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NO | Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date) |
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The Deposition Mechanisms and Microstructures of Tungsten Films Produced by Silicon Reduction of WF6 Park, Heung Lak; Park, Chong Do; Chun , Soung Soon, THIN SOLID FILMS, v.166, pp.37 - 43, 1988 |
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