Browse "RIMS Journal Papers" by Author Kang, S.W.
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| Dependence of oxygen redistribution on titanium film thickness during titanium silicide formation by rapid thermal annealing Kang, S.W.; Park, Sin Chong; Chun , Soung Soon, JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, v.7, no.6, pp.3246 - 3250, 1989-11 |
| Effects of amorphous silicon capping layer on arsenic redistribution during TiSi2 formation Kang, S.W.; Park, S.C.; Chun, S., APPLIED PHYSICS LETTERS, v.54, no.8, pp.693 - 695, 1988-02 |
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