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Ultra thin polyoxide grown by ECR(Electron Cyclotron Resonance) N2O Plasma Han, S.Y.; Lee, J.H.; Hyung-Cheol Shin, ELECTRONICS LETTERS, v.36, no.4, pp.361 - 362, 2000-02 |
Ultrathin Oxide Grown on Polysilicon by Using an Electron Cyclotron Resonance N2O Plasma Han, S.Y.; Hyung-Cheol Shin, JOURNAL OF THE KOREAN PHYSICAL SOCIETY, v.37, no.6, pp.893 - 896, 2000-12 |
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