학위논문(석사) - 한국과학기술원 : EEWS대학원, 2015.2 ,[x, 47 p :]
Metal-assisted chemical etching (MaCE); Inverse metal-assisted chemical etching (Inverse MaCE); Nano- and Micro-structures; Silicon (Si); III-V Semiconductor; Gallium Phosphide (GaP); Nanosphere lithography (NSL); Photolithography; 금속 촉매 화학 식각; 역(逆) 금속 촉매 화학 식각; 나노; 마이크로 구조; 실리콘; 3-5 족 반도체; 인화갈륨; 나노입자 리소그래피; 포토리소그래피
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