DC Field | Value | Language |
---|---|---|
dc.contributor.author | Kim, YS | ko |
dc.contributor.author | Shin, Sung-Chul | ko |
dc.date.accessioned | 2010-11-22T03:01:13Z | - |
dc.date.available | 2010-11-22T03:01:13Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 1999-06 | - |
dc.identifier.citation | JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS, v.198-99, pp.602 - 604 | - |
dc.identifier.issn | 0304-8853 | - |
dc.identifier.uri | http://hdl.handle.net/10203/20212 | - |
dc.description.abstract | We have developed an ultrahigh sensitive in situ stress-measurement apparatus for thin films using an optical non-contact displacement detector. A change of the gap distance between the detector and the substrate, caused by stress of a deposited film, was detected by a corresponding change of the reflectivity. The sensitivity of the displacement detector was 132 mV/mu m and a minimum detectable displacement was 7.6 Angstrom. The apparatus was applied to in situ stress measurements of several multilayers prepared on glass substrate by DC magnetron sputtering The sensitivity of the detector turned out to be sensitive enough to observe the coherent-to-incoherent transition in the matching planes of Co/Pd, Co/Pt, and Ni/Pt multilayers. (C) 1999 Elsevier Science B.V. All rights reserved. | - |
dc.description.sponsorship | This work was supported by the Creative Research Initiatives of the Ministry of Science and Technology of Korea. | en |
dc.language | English | - |
dc.language.iso | en_US | en |
dc.publisher | ELSEVIER SCIENCE BV | - |
dc.subject | MAGNETIC-ANISOTROPY | - |
dc.subject | MAGNETOSTRICTION | - |
dc.title | Layer-by-layer in situ stress measurements of metallic multilayers with atomic-layer sensitivity | - |
dc.type | Article | - |
dc.identifier.wosid | 000080779600190 | - |
dc.identifier.scopusid | 2-s2.0-0032680547 | - |
dc.type.rims | ART | - |
dc.citation.volume | 198-99 | - |
dc.citation.beginningpage | 602 | - |
dc.citation.endingpage | 604 | - |
dc.citation.publicationname | JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS | - |
dc.embargo.liftdate | 9999-12-31 | - |
dc.embargo.terms | 9999-12-31 | - |
dc.contributor.localauthor | Shin, Sung-Chul | - |
dc.contributor.nonIdAuthor | Kim, YS | - |
dc.type.journalArticle | Article; Proceedings Paper | - |
dc.subject.keywordAuthor | in situ stress measurements | - |
dc.subject.keywordAuthor | optical displacement detector | - |
dc.subject.keywordAuthor | atomic-layer sensitivity | - |
dc.subject.keywordAuthor | multilayers | - |
dc.subject.keywordPlus | MAGNETIC-ANISOTROPY | - |
dc.subject.keywordPlus | MAGNETOSTRICTION | - |
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