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Deadlock-free scheduling of photolithography equipment in semiconductor fabrication Yoon, HJ; Lee, Doo Yong, IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, v.17, no.1, pp.42 - 54, 2004-02 |
금속성 쌍곡선 메타물질을 이용한 나노 구조체 제작 = Generation of nanostructures with the metallic hyperbolic metamateriallink 김동환; Kim, Dong Hwan; et al, 한국과학기술원, 2016 |
하이퍼볼릭 메타물질을 이용한 나노리소그래피 = Nanolithography using hyperbolic metamaterialslink 조용래; Cho, Yong-Rae; et al, 한국과학기술원, 2014 |
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