Browse "School of Mechanical and Aerospace Engineering(기계항공공학부)" by Subject Maskless lithography▼aDigital miromirror device▼aDigital lithography▼aVector image▼aSemiconductor device fabrication▼aPulse exposure
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| Enhancement of patterning speed for DMD-based maskless lithography through pulse-exposure method = 펄스 노광 기법을 통한 DMD 기반 마스크리스 리소그래피의 패터닝 속도 향상link Choi, Jin-Su; Yoo, Hongki; et al, 한국과학기술원, 2021 |
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