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Complete 3-D self-calibration of coordinate measuring machines Dang Q.C.; Yoo S.; Kim, Seung-Woo, CIRP ANNALS-MANUFACTURING TECHNOLOGY, v.55, no.1, pp.527 - 530, 2006 |
Error propagation in calibration of E-beam lithography stages Yoo S.; Kim, Seung-Woo, Photomask and Next-Generation Lithography Mask Technology X, v.5130, pp.339 - 346, 2003-04-16 |
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