Browse "School of Mechanical and Aerospace Engineering(기계항공공학부)" by Author Yamanaka, T
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| Optimizing CMP for Ultra-Low-k Dielectrics Kim, Taek-Soo; Konno, T; Yamanaka, T; R.H. Dauskardt, 13th International Chemical Mechanical Planarization Conference for ULSI Multilevel Interconnection, 13th International Chemical Mechanical Planarization Conference for ULSI Multilevel Interconnection, 2008-01-01 |
| Quantitative Roadmap for Optimizing CMP of Ultra-Low-k Dielectrics Kim, Taek-Soo; Konno, T; Yamanaka, T; R.H. Dauskardt, IEEE International Interconnect Technology Conference , IEEE, 2008-06-01 |
| Quantitative Roadmap for Optimizing CMP of Ultralow-k Dielectrics Kim, Taek-Soo; Konno, T; Yamanaka, T; R.H. Dauskardt, Materials Research Society 2009 Spring Meeting, Materials Research Society, 2009-04-14 |
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