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Showing results 1 to 4 of 4

1
An ellipsometric data acquisition method for thin film thickness measurement in real time

Ye, Sang-Heon; Kim, Soohyun; Kwak, Yoon Keun; Cho, Hyun Mo; Cho, Yong Jai; Chegal, Won, MEASUREMENT SCIENCE & TECHNOLOGY, v.19, 2008-04

2
In-situ single wavelength ellipsometer for a vacuum chamber

Chegal, Won; Ye, SH; Lee, YW; Kim, Soohyun; Kwak, Yoon Keun, International Society for Optical Engineering (SPIE), pp.15 - 18, SPIE, 2001-06

3
Non-destructive surface profile measurement of a thin film deposited on a patterned sample

Kim, DS; Chegal, Won; Kim, Soohyun; Kong, HJ; Lee, YW, 2003 International Conference on Characterization and Metrology for ULSI Technology, pp.357 - 361, American Institute of Physics, 2003-09-30

4
퍼지 알고리즘을 이용한 압전소자 구동 액츄에이터의 위치제어에 관한 연구 = A study on position control of piezo-driven translation actuator using fuzzy algorithmslink

제갈원; Chegal, Won; et al, 한국과학기술원, 1998

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