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1
A new spectral imaging ellipsometer for measuring the thickness of patterned thin films

Chegal, W; Cho, YJ; Kim, HJ; Cho, HM; Lee, YW; Kim, Soohyun, JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, v.43, pp.6475 - 6476, 2004-09

2
Angle-resolved annular data acquisition method for microellipsometry

Ye, SH; Kim, Soohyun; Kwak, Yoon Keun; Cho, HM; Cho, YJ; Chegal, W, OPTICS EXPRESS, v.15, no.26, pp.18056 - 18065, 2007-12

3
Calibration method for rotating-analyser-type spectral imaging ellipsometers

Chegal, W; Cho, YJ; Oh, SB; Cho, HM; Lee, YW; Kim, Soohyun, MEASUREMENT SCIENCE & TECHNOLOGY, v.16, pp.716 - 722, 2005-03

4
Non-destructive surface profile measurement of a patterned sample using acousto-optic tunable filter

Kim, Soohyun; Kim, DS; Chegal, W; Kong, HJ; Lee,YW, SPIE proceedings, Characterization and Metrology for ULSI Technology, 2003

5
One-dimensional Spectroscopic Measurement of Patterned Structures Using a Custom-built Spectral Imaging Ellipsometer

Chegal, W; Kim, DS; Kim, Soohyun; Cho, YJ; Cho, HM; Lee, YW, 2003 International conference for Characterization and Metrology for ULSI Technology, 2003-06-24

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