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Characterizing the Performance of a Resonance-Based MEMS Particle Sensor with Glass Beads Choi, Ji-Seob; Noh, Jinhong; Choi, Hongsoo; Yoon, Yong-Jin; Park, Woo-Tae, INTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING-GREEN TECHNOLOGY, 2024-03 |
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