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Phase shifting interferometry for large-sized surface measurements by sweeping the repetition rate of femtosecond light pulses Joo, Woo-Deok; Park, Ji-Yong; Kim, Seung-Man; Kim, Seung-Chul; Kim, Yun-Seok; Kim, Seung-Woo; KIM, Young-Jin, INTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING, v.14, no.2, pp.241 - 246, 2013-02 |
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