Showing results 1 to 1 of 1
Mechanical Abrasion by Bi-layered Pad Micro-Asperity in Chemical Mechanical Polishing Ryu, Hyun Jun; Kim, Dong Geun; Kang, Sukkyung; Jeong, Ji-hun; Kim, Sanha, CIRP ANNALS-MANUFACTURING TECHNOLOGY, v.70, no.1, pp.273 - 276, 2021-07 |
Discover