Browse "School of Electrical Engineering(전기및전자공학부)" by Subject X-ray lithography

Showing results 2 to 2 of 2

2
Reliability of thin gate oxides irradiated under X-ray lithography conditions

Cho, Byung Jin; Kim, SJ; Ang, CH; Ling, CH; Joo, MS; Yeo, IS, JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES REVIEW PAPERS, v.40, no.4B, pp.2819 - 2822, 2001-04

Discover

Type

Open Access

Date issued

. next

Subject

. next

rss_1.0 rss_2.0 atom_1.0