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FORMATION OF HIGH-QUALITY STORAGE CAPACITOR DIELECTRICS BY IN-SITU RAPID THERMAL REOXIDATION OF SI3N4 FILMS IN N2O AMBIENT Yoon, Giwan; LO, GQ; KIM, J; HAN, LK; KWONG, DL, IEEE ELECTRON DEVICE LETTERS, v.15, no.8, pp.266 - 268, 1994-08 |
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