Browse "School of Electrical Engineering(전기및전자공학부)" by Subject NANOLITHOGRAPHY
Showing results 2 to 3 of 3
| Pattern Distortion Analysis of Surface Plasmon Interference Lithography Using Line Grating Structure on Photoresist Kim, Yong Min; Choi, Kyung Cheol, IEEE TRANSACTIONS ON NANOTECHNOLOGY, v.15, no.2, pp.220 - 224, 2016-03 |
| Surface plasmon-assisted nano-lithography with a perfect contact aluminum mask of a hexagonal dot array Kim, Eun Sung; Kim, Yong Min; Choi, Kyung Cheol, PLASMONICS, v.11, no.5, pp.1337 - 1342, 2016-10 |
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