Showing results 1 to 3 of 3
A trans-scaled nanofabrication using 3D diffuser lithography, metal molding and nano-imprinting Kim, Dong-Haan; Lee, Joo-Hyung; Lee, Hyung-Suk; Yoon, Jun-Bo, JOURNAL OF MICROMECHANICS AND MICROENGINEERING, v.21, no.4, 2011-04 |
Pattern Distortion Analysis of Surface Plasmon Interference Lithography Using Line Grating Structure on Photoresist Kim, Yong Min; Choi, Kyung Cheol, IEEE TRANSACTIONS ON NANOTECHNOLOGY, v.15, no.2, pp.220 - 224, 2016-03 |
Surface plasmon-assisted nano-lithography with a perfect contact aluminum mask of a hexagonal dot array Kim, Eun Sung; Kim, Yong Min; Choi, Kyung Cheol, PLASMONICS, v.11, no.5, pp.1337 - 1342, 2016-10 |
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