Browse "School of Electrical Engineering(전기및전자공학부)" by Subject spacer patterning

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Fabrication of Vertical Silicon Nanotube Array Using Spacer Patterning Technique and Metal-Assisted Chemical Etching

Jeong, Hyeon Ho; Lee, Junghyung; Bok, Cheolkyu; Lee, Seok-Heeresearcher; Yoo, Seunghyupresearcher, IEEE TRANSACTIONS ON NANOTECHNOLOGY, v.16, no.1, pp.130 - 134, 2017-01

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