Browse "School of Electrical Engineering(전기및전자공학부)" by Subject plasma etching
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| Silicon Nanowire All-Around Gate MOSFETs Built on a Bulk Substrate by All Plasma-Etching Routes Moon, Dong-Il; Choi, Sung-Jin; Kim, Chung-Jin; Kim, Jee-Yeon; Lee, Jin-Seong; Oh, Jae-Sub; Lee, Gi-Sung; et al, IEEE ELECTRON DEVICE LETTERS, v.32, no.4, pp.452 - 454, 2011-04 |
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