Browse "School of Electrical Engineering(전기및전자공학부)" by Subject NICKEL

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A Proactive Plastic Deformation Method for Fine-Tuning of Metal-Based MEMS Devices After Fabrication

Yoon, Yong Hoon; Han, Chang-Hoon; Lee, Jae Shin; Yoon, Jun-Boresearcher, JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, v.27, no.6, pp.1124 - 1134, 2018-12

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