Browse "School of Electrical Engineering(전기및전자공학부)" by Subject NH3

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TiN barrier layer formation by the two-step rapid thermal conversion process

Kim, YT; Jun, CH; Lee, JH; Baek, JT; Joun, H; Yoo, Hyung Jounresearcher, JOURNAL OF VACUUM SCIENCE TECHNOLOGY A-VACUUM SURFACES AND FILMS, v.14, no.6, pp.3245 - 3251, 1996

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