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Effects of thermal annealing Of W/SiO2 multilayer Bragg reflectors on resonance characteristics of film bulk acoustic resonator devices with cobalt electrodes Yim, Mun-Hyuk; Kim, Dong-Hyun; Chai, Dong-Kyu; Yoon, Gi-Wan, JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, v.22, no.3, pp.465 - 471, 2004-05 |
Improved resonance characteristics by thermal annealing of W/SiO2 multi-layers in film bulk acoustic wave resonator devices Kim, Dong-Hyun; Yim, Mun-Hyuk; Chai, Dong-Kyu; Park, Jin-Seok; Yoon, Gi-Wan, JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS , v.43, no.4A, pp.1545 - 1550, 2004-04 |
Resonance Characteristic Improvement of ZnO-based FBAR Devices Fabricated on Thermally Annealed Bragg Reflectors Yoon, Giwan; Yim, Mun-Hyuk; Kim, Dong-Hyun; Mai, Linh, JOURNAL OF INFORMATION AND COMMUNICATION CONVERGENCE ENGINEERING, v.1, no.4, pp.199 - 204, 2003-12 |
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