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SRAF printing prediction using artificial neural network Kwon, Yonghwi; Yang, Jinho; Kim, Sungho; Kim, Cheolkyun; Shin, Youngsoo, Conference on Optical Microlithography XXXIII, SPIE, 2020-02-25 |
Sub-resolution assist feature printability prediction using machine learning = 기계학습을 이용한 해상도 이하 보조형상의 인쇄가능성 예측link Yang, Jinho; Shin, Youngsoo; et al, 한국과학기술원, 2019 |
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