Browse "School of Electrical Engineering(전기및전자공학부)" byAuthorWada, H

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Optical characterization of high speed scanning micromirrors with vertical combdrives

Wada, H; Lee, D; Yu, Kyoungsikresearcher; Krishnamoorthy, U; Solgaard, O, JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, v.41, no.10B, pp.1169 - 1171, 2002-10

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