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High-resolution microelectromechanical scanners for miniaturized dual-axes confocal microscopes Ra, H.; Jung, I.W.; Lee, D.; Krishnamoorthy, U.; Yu, Kyoungsik; Solgaard, O., SPIE (Optical Transmission, Switching, and Subsystems) , v.5721, no.0, pp.132 - 135, SPIE, 2005-01 |
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