Browse "School of Electrical Engineering(전기및전자공학부)" by Author Jun, CH
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| Growth behavior of copper metalorganic chemical vapor deposition using the (hfac)Cu(VTMOS) precursor on titanium nitride substrates Jun, CH; Kim, YT; Baek, JT; Yoo, Hyung Joun; Kim, DR, JOURNAL OF VACUUM SCIENCE TECHNOLOGY A-VACUUM SURFACES AND FILMS, v.14, no.6, pp.3214 - 3219, 1996 |
| TiN barrier layer formation by the two-step rapid thermal conversion process Kim, YT; Jun, CH; Lee, JH; Baek, JT; Joun, H; Yoo, Hyung Joun, JOURNAL OF VACUUM SCIENCE TECHNOLOGY A-VACUUM SURFACES AND FILMS, v.14, no.6, pp.3245 - 3251, 1996 |
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