Browse "School of Electrical Engineering(전기및전자공학부)" by Author 朴在墩

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C2F6 가스가 Via Etching 특성에 미치는 영향

柳知亨; 윤기완; 朴在墩, 전자공학회논문지 - SD, v.39, no.1, pp.31 - 38, 2002-01

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