Browse "School of Electrical Engineering(전기및전자공학부)" by Subject spacer patterning process technology
Showing results 1 to 1 of 1
| A spacer patterning technology for nanoscale CMOS Choi, Yang-Kyu; King, TJ; Hu, CM, IEEE TRANSACTIONS ON ELECTRON DEVICES, v.49, no.3, pp.436 - 441, 2002-03 |
Discover
Open Access
- 573 OA Article
Date issued
- 4,863 2020 - 2024
- 18,943 2010 - 2019
- 15,019 2000 - 2009
- 7,644 1990 - 1999
- 2,391 1980 - 1989