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Low-temperature fabrication of Ge-On-Insulator substrate with various channel orientation and its analysis for monolithic 3D integration = 모놀리식 3D 집적을 위한 다양한 기판 방향 별 Ge-On-Insulator 저온 공정 및 분석link

Lee, Seung Woo, 한국과학기술원, 2022

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