Browse "School of Electrical Engineering(전기및전자공학부)" by Subject KRF
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| Two-wavelength anti-reflection coating for ArF excimer laser lithography optics Kim, Jong Soo; Chung, Hai Bin; Yoo, Hyung Joun; Kim, Bo Woo, JOURNAL OF THE KOREAN PHYSICAL SOCIETY, v.33, no.2, pp.136 - 142, 1998-08 |
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