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Growth Mechanism of SOI-GaAs Films on CaF2/Si Structures in the Electron-Beam Exposure and Epitaxy(EBE-epitaxy) Technique Lee, Hee Chul; Asano, T; ishiwara, H; Furukawa, S, Ext. Abst. 20th Conf. on Solid State Devices and Materials, pp.291 - 294, 1988 |
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