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Drift-free single crystalline silicon micromirror with floating field limiting shields Yoo, BW; Jang, YH; Yu, Kyoungsik; Park, JH; Kim, YK, Optical MEMS and Nanophotonics, 2007 IEEE/LEOS International Conference on, pp.81 - 82, IEEE/LEOS, 2007-07-12 |
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